Piikiekkojen käsittely, kuljetuskorit piikiekoille

Toimittaja: ENTEGRIS
A182-60MU-0215 A190-60M-0215 A182-60MB-0215 A194-60MB-0215 A190-60MB-0215 A182-60M-0215 A190-60MH-0215 A182-60MC-0215 A18260MBH0215
216-2062EA 0 EUR
216-2062 216-1575 216-1573 216-2065 216-2063 216-2059 216-2064 216-2061 216-2060
Piikiekkojen käsittely, kuljetuskorit piikiekoille
Piikiekkojen käsittely Kasetti
182 Series
The industry standard 150 mm process wafer carrier. Four-point contact on the 'H' bar for improved wafer positioning. Open sidewall design to minimise liquid traps and promote even solution coverage and drainage. High profile design for maximum wafer protection.

'H' bar equipment interface
Pins and holes on the top rail
Chemical resistant natural PFA material
Wafer capacity: 25
D1 dimension: 14,5 mm
Pocket spacing: 4,8 mm
Pocket flat: 1,5 mm

190 Series
Low profile for optimum performance in centrifugal applications. Low contour for improved spray penetration to the wafers. OpenMore Product Information
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